ISBN: 9783642796807

The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the drama… Mehr…

The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter­ action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity. Trade Books>Trade Paperback>Science>Engineering>Chemical Engr, Springer Berlin Heidelberg Core >1<

2011, ISBN: 364279680X

[EAN: 9783642796807], Neubuch, [PU: Springer Berlin Heidelberg], DIFFRACTION ELLIPSOMETRY SCATTERING SPECTROSCOPY TECHNIK ELEKTRONIK ELEKTROTECHNIK NACHRICHTENTECHNIK SEMICONDUCTOR ELEKTR… Mehr…

[EAN: 9783642796807], Neubuch, [PU: Springer Berlin Heidelberg], DIFFRACTION ELLIPSOMETRY SCATTERING SPECTROSCOPY TECHNIK ELEKTRONIK ELEKTROTECHNIK NACHRICHTENTECHNIK SEMICONDUCTOR ELEKTRONISCHE GERÄTE UND MATERIALIEN SEMICONDUCTORS OPTICAL AND ELECTRONIC MATERIALS SURFACES INTERFACES, THIN FILMS, Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers a., Books<

2011, ISBN: 364279680X

Softcover reprint of the original 1st ed. 1996 Kartoniert / Broschiert Materialwissenschaft, Technische Anwendung von elektronischen, magnetischen, optischen Materialien, Elektronische … Mehr…

Softcover reprint of the original 1st ed. 1996 Kartoniert / Broschiert Materialwissenschaft, Technische Anwendung von elektronischen, magnetischen, optischen Materialien, Elektronische Geräte und Materialien, diffraction; ellipsometry; scattering; Spectroscopy, mit Schutzumschlag 11, [PU:Springer Berlin Heidelberg; Springer-Verlag GmbH]<

ISBN: 9783642796807

Paperback / softback. New. The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last deca… Mehr…

Paperback / softback. New. The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade., 6<

2011, ISBN: 9783642796807

Taschenbuch

Buch, Softcover, Softcover reprint of the original 1st ed. 1996, [PU: Springer Berlin], Springer Berlin, 2011