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Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) - gebunden oder broschiert
ISBN: 0819483249
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Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) - gebunden oder broschiert
2011, ISBN: 0819483249
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2011, ISBN: 9780819483249
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Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) - gebunden oder broschiert
ISBN: 0819483249
[SR: 394058], Hardcover, [EAN: 9780819483249], SPIE Press, SPIE Press, Book, [PU: SPIE Press], SPIE Press, The publication of Principles of Lithography, Third Edition just five years afte… Mehr…
Harry J. Levinson:
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) - gebunden oder broschiertISBN: 0819483249
[SR: 394058], Hardcover, [EAN: 9780819483249], SPIE Press, SPIE Press, Book, [PU: SPIE Press], SPIE Press, The publication of Principles of Lithography, Third Edition just five years afte… Mehr…
ISBN: 9780819483249
Paperback, [PU: SPIE Press], The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature… Mehr…
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) - gebunden oder broschiert
2011, ISBN: 0819483249
[EAN: 9780819483249], Gebraucht, wie neu, [PU: SPIE Press], Almost new condition.
2011, ISBN: 9780819483249
Hardcover, Great customer service. You will be happy!, Neubuch, P11, [PU: SPIE Press]
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This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well.
Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Detailangaben zum Buch - Principles of Lithography (SPIE Press Monograph)
EAN (ISBN-13): 9780819483249
ISBN (ISBN-10): 0819483249
Gebundene Ausgabe
Taschenbuch
Erscheinungsjahr: 2011
Herausgeber: SPIE Press
Buch in der Datenbank seit 2012-10-20T19:29:17+02:00 (Berlin)
Detailseite zuletzt geändert am 2022-12-26T17:28:36+01:00 (Berlin)
ISBN/EAN: 9780819483249
ISBN - alternative Schreibweisen:
0-8194-8324-9, 978-0-8194-8324-9
Alternative Schreibweisen und verwandte Suchbegriffe:
Autor des Buches: harry
Titel des Buches: spie vol, lithography
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