ISBN: 9780470851067
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but… Mehr…
ebooks.com Versandkosten: EUR 0.00 Details... |
ISBN: 0470851066
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but… Mehr…
Fnac.com Nr. Versandkosten:, Le délai dépend du marchand, plus shipping costs. (EUR 16.85) Details... |
ISBN: 0470851066
[SR: 2756115], Paperback, [EAN: 9780470851067], Wiley-Blackwell, Wiley-Blackwell, Book, [PU: Wiley-Blackwell], Wiley-Blackwell, 278299, Nanotechnology, 278150, Electrical, 278115, Enginee… Mehr…
amazon.co.uk |
ISBN: 9780470851067
Wiley. Used - Good. Shows some signs of wear, and may have some markings on the inside. 100% Money Back Guarantee. Shipped to over one million happy customers. Your purchase benefits wo… Mehr…
Biblio.com |
ISBN: 0470851066
[EAN: 9780470851067], Neubuch, [PU: Wiley], Technology|Electronics|Circuits|VLSI, Technology|General
AbeBooks.de Murray Media, MIAMI SHORES, FL, U.S.A. [59705792] [Rating: 5 (von 5)] NEW BOOK Versandkosten: EUR 7.10 Details... |
ISBN: 9780470851067
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but… Mehr…
ISBN: 0470851066
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but… Mehr…
ISBN: 0470851066
[SR: 2756115], Paperback, [EAN: 9780470851067], Wiley-Blackwell, Wiley-Blackwell, Book, [PU: Wiley-Blackwell], Wiley-Blackwell, 278299, Nanotechnology, 278150, Electrical, 278115, Enginee… Mehr…
ISBN: 9780470851067
Wiley. Used - Good. Shows some signs of wear, and may have some markings on the inside. 100% Money Back Guarantee. Shipped to over one million happy customers. Your purchase benefits wo… Mehr…
ISBN: 0470851066
[EAN: 9780470851067], Neubuch, [PU: Wiley], Technology|Electronics|Circuits|VLSI, Technology|General
Bibliographische Daten des bestpassenden Buches
Autor: | |
Titel: | |
ISBN-Nummer: |
Detailangaben zum Buch - Introduction to Microfabrication
EAN (ISBN-13): 9780470851067
ISBN (ISBN-10): 0470851066
Taschenbuch
Erscheinungsjahr: 2004
Herausgeber: John Wiley & Sons
422 Seiten
Gewicht: 0,907 kg
Sprache: eng/Englisch
Buch in der Datenbank seit 2007-06-24T11:17:08+02:00 (Berlin)
Detailseite zuletzt geändert am 2018-08-22T06:02:48+02:00 (Berlin)
ISBN/EAN: 0470851066
ISBN - alternative Schreibweisen:
0-470-85106-6, 978-0-470-85106-7
Alternative Schreibweisen und verwandte Suchbegriffe:
Autor des Buches: franssila
Titel des Buches: introduction microfabrication
Daten vom Verlag:
Autor/in: Sami Franssila
Titel: Introduction to Microfabrication
Verlag: John Wiley & Sons
Erscheinungsjahr: 2004-04-20
Gewicht: 0,914 kg
Sprache: Englisch
44,90 € (DE)
Not available (reason unspecified)
BC; PB; Hardcover, Softcover / Technik/Elektronik, Elektrotechnik, Nachrichtentechnik; Elektronik, Nachrichtentechnik; Nanotechnologie; Elektronik
Preface. Acknowledgements. PART I: INTRODUCTION. 1. Introduction. 2. Micrometrology and Materials Characterization. 3. Simulation of Microfabrication Processes. PART II: MATERIALS. 4. Silicon. 5. Thin-Film Materials and Processes. 6. Epitaxy. 7. Thin-film Growth and Structure. PART III: BASIC PROCESSES. 8. Pattern Generation. 9. Optical Lithography. 10. Lithographic Patterns. 11. Etching. 12. Wafer Cleaning and Surface Preparation. 13. Thermal Oxidation. 14. Diffusion. 15. Ion Implantation. 16. CMP: Chemical-Mechanical Polishing. 17. Bonding and Layer Transfer. 18. Molding and Stamping. PART IV: STRUCTURES. 19. Self-aligned Structures. 20. Plasma-etched Structures. 21. Wet-etched Structures. 22. Sacrificial Structures. 23. Structures by Deposition. PART V: INTEGRATION. 24. Process Integration. 25. CMOS Transistor Fabrication. 26. Bipolar Technology. 27. Multilevel Metallization. 28. MEMS Process Integration. 29. Processing on Non-silicon Substrates. PART VI: TOOLS. 30. Process for Microfabrication. 31. Tools for Hot Process. 32. Vacuum and Plasmas. 33. Tools for CVD and Epitaxy. 34. Integrated Processing. PART VII: MANUFACTURING. 35. Cleanrooms. 36. Yield. 37. Wafer Fab. PART VIII: FUTURE. 38. Moore's Law. 39. Microfabrication at Large. Appendix A: Comments and Hints to Selected Problems. Appendix B: Constants and Conversion Factors. Index.Weitere, andere Bücher, die diesem Buch sehr ähnlich sein könnten:
Neuestes ähnliches Buch:
9780470666722 Introduction to Microfabrication (Peter Coles)
< zum Archiv...